The old Scanning Electron Microscope (SEM) used in IPC-BAS until the middle of 2006 is JEOL JCXA-733 Super Probe which certificate of installation is dated 1979. Thus the existing in IPC-BAS SEM-EDS (Energy Dispersive X-ray Spectrometry) equipment was morally and physically old and its exploitation was repeatedly interrupted for numerous reparations. A lot of modules of SEM have been replaced by not original components. On the other hand, IPC-BAS has specialists in using similar equipment and capable to be trained for operating of the new SEM (JEOL 6390) with EDS (Oxford Inca Energy 350).

The new SEM is one of the most advanced in this type of microscopes (JEOL 6390). The main features of this equipment are as follow:
- System of digital technology, PC controlled, with fully automated electron gun;
- Resolution 3 nm at 30 KV;
- Friendly software with possibility to customize GUI;
- Eucentric Specimen Stage;
- EDX analysis of elements from Be to U;
- Option for future upgrade with WDS (Wavelenth dispersive X-ray Spectrometry) when EDS and WDS will use the same GUI (graphical user interface);
- Improvement of Low kV Resolution:

The microscope was equipped with Oxford Inca Energy 350, which is the most advanced EDX system. It is compatible with JEOL 6390 and with a future WDS analytical system. In addition, they could be run under the same GUI. A Probe Current Detector with digital ammeter and a system for closed cycle of the cooling water for reduction of water consumption and for independence on the reduction of water pressure were included in the equipment. The Probe Current Detector is a device that measures the current of the primary electron beam and is controlled directly from the SEM user interface. Coupled with a digital ammeter it enables precise current monitoring during quantitative EDS analysis, thus allowing eventual fluctuations in the current to be compensated and the results corrected by the EDS software. This technique is used extensively in dedicated Electron Microprobes and the JSM-6390 is one of the few conventional SEM's on the market that can provide this facility.

The new facilities were put into action in June 2006 and they are applied for permanent control of samples, prepared in IPC-BAS and used in our own investigations and other European joint projects. Thus, it will ensure the compatibility with modern equipment in the other European countries. For this purpose a special room on the first floor of the building was equipped. Two operators received good training to operate and to work with the SEM equipment. One of them is a young scientist employed to work with the new equipment and paid direct by the NANOPHEN project since January 2006.

The new SEM equipment is now being used in full capacity.