Electron microscope JEOL 6390 with INCA Oxford EDS detector:
- surface morphology – images in secondary electrons
- density distribution – images in back-scattered electrons
- elemental analysis – oxides, all elements incl. carbon
- line scanning elemental analysis
- elemental mapping
- image mixing, spectra comparing
- elemental analysis with standarts


Electron microscope JEOL 5300:
- surface morphology – secondary electrons images
- vacuum coating with carbon (arc discharge coater)
   and/or gold (cathode sputter coater)


ELMI Sputter: