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				Electron microscope JEOL 6390 with INCA Oxford EDS detector: - surface morphology – images in secondary electrons - density distribution – images in back-scattered electrons - elemental analysis – oxides, all elements incl. carbon - line scanning elemental analysis - elemental mapping - image mixing, spectra comparing - elemental analysis with standarts  | 
			
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				Electron microscope JEOL 5300:  - surface morphology – secondary electrons images - vacuum coating with carbon (arc discharge coater) and/or gold (cathode sputter coater)  | 
			
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ELMI Sputter: